Acoustic silicon sensors
نویسندگان
چکیده
منابع مشابه
Sensors - Acoustic Wave Technology Sensors
Acoustic wave devices have been in commercial use for more than 60 years. The telecommunications industry is the largest consumer, accounting for ~3 bil lion acoustic wave filters annually, primarily in mobile cell phones and base stations. These are typically surface acoustic wave (SAW) devices, and act as bandpass filters in both the radio frequency and intermediate frequency sections of the ...
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Amorphous titanium dioxide (TiO2) and gold (Au) doped TiO2-based surface acoustic wave (SAW) sensors have been investigated as hydrogen gas detectors. The nanocrystal-doped TiO2 films were synthesized through a sol-gel route, mixing a Ti-butoxide-based solution with diluted colloidal gold nanoparticles. The films were deposited via spin coating onto 64◦ YX LiNbO3 SAW transducers in a helium atm...
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ژورنال
عنوان ژورنال: The Journal of the Acoustical Society of America
سال: 1994
ISSN: 0001-4966
DOI: 10.1121/1.409402